Masaki Shimofuri
Department:
Micro Engineering
Keywords:
MEMS, Nano-micro machining, Nanogap, Thermal characteristic measurement
Email:
m_shimofuri at nms.me.kyoto-u.ac.jp
Homepage:
https://www.nms.me.kyoto-u.ac.jp
Nanomicromachines fabricated by semiconductor microfabrication technology enable the measurement, control, and utilization of nano- and micro-scale quantum phenomena. By using these machines, I am studying highly efficient methods of fabricating and controlling parallel-plate nanogaps with large working area and small separations, and methods of measuring their physical characteristics, which are expected to be applied to high-performance thermal control and energy harvesting.
