Masaki Shimofuri (Program-Specific Assistant Professor, Mechanical Engineering and Science) received “Excellent Paper Award” at the 11th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2024)

Masaki Shimofuri (Program-Specific Assistant Professor, Mechanical Engineering and Science) received “Excellent Paper Award” at the 11th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2024).

Title: Nanometer-Order Stable Separation Control of Nanogaps with (111) Silicon
Cleavage Planes in Vacuum

Authors: Masaki Shimofuri, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya